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<channel>
	<title>Lurie Nanofabrication Facility</title>
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	<link>http://lnf.umich.edu/index.php</link>
	<description>microfabrication nanofabrication services</description>
	<lastBuildDate>Wed, 15 May 2013 04:24:31 +0000</lastBuildDate>
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		<title>Atomic-scale Modeling of Nanoelectronic Devices With Atomistix ToolKit</title>
		<link>http://lnf.umich.edu/nnin-at-michigan/index.php/2013/04/atomistix/?utm_source=rss&#038;utm_medium=rss&#038;utm_campaign=atomic-scale-modeling-of-nanoelectronic-devices-with-atomistix-toolkit</link>
		<comments>http://lnf.umich.edu/nnin-at-michigan/index.php/2013/04/atomistix/#comments</comments>
		<pubDate>Mon, 13 May 2013 21:26:22 +0000</pubDate>
		<dc:creator>paramesh</dc:creator>
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		<guid isPermaLink="false">http://lnf.umich.edu/index.php/?p=2507</guid>
		<description><![CDATA[Event Information:
Topic: Atomic-scale Modeling of Nanoelectronic Devices With Atomistix ToolKit
Date: May 28th, 2013
Time: 11:00 am &#8211; 12:00 pm EDT.
Presenters:
Dr. Anders Blom, QuantumWise&#8230; <a href="http://lnf.umich.edu/nnin-at-michigan/index.php/2013/04/atomistix/" class="read_more">Read More</a>]]></description>
			<content:encoded><![CDATA[<div class="announcement_post"><p><strong>Event Information</strong>:<br />
Topic: Atomic-scale Modeling of Nanoelectronic Devices With Atomistix ToolKit<br />
Date: May 28th, 2013<br />
Time: 11:00 am &#8211; 12:00 pm EDT.</p>
<p><strong>Presenters</strong>:<br />
Dr. Anders Blom, QuantumWise</p>
</div>
]]></content:encoded>
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		</item>
		<item>
		<title>Photomask Ordering</title>
		<link>http://lnf.umich.edu/nnin-at-michigan/index.php/photomask-workshop/?utm_source=rss&#038;utm_medium=rss&#038;utm_campaign=photomask-ordering</link>
		<comments>http://lnf.umich.edu/nnin-at-michigan/index.php/photomask-workshop/#comments</comments>
		<pubDate>Mon, 06 May 2013 16:15:33 +0000</pubDate>
		<dc:creator>paramesh</dc:creator>
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		<guid isPermaLink="false">http://lnf.umich.edu/index.php/?p=2497</guid>
		<description><![CDATA[The NNIN at the University of Michigan will be hosting a presentation from on &#8220;Guidelines for Commercial Photomask Ordering.&#8221;&#8230; <a href="http://lnf.umich.edu/nnin-at-michigan/index.php/photomask-workshop/" class="read_more">Read More</a>]]></description>
			<content:encoded><![CDATA[<div class="announcement_post"><p>The NNIN at the University of Michigan will be hosting a presentation from on &#8220;Guidelines for Commercial Photomask Ordering.&#8221;</p>
</div>
]]></content:encoded>
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		</item>
		<item>
		<title>Multiphase CFD for Droplet Based Microfluidics</title>
		<link>http://lnf.umich.edu/nnin-at-michigan/index.php/multiphase-cfd?utm_source=rss&#038;utm_medium=rss&#038;utm_campaign=multiphase-cfd-for-droplet-based-microfluidics</link>
		<comments>http://lnf.umich.edu/nnin-at-michigan/index.php/multiphase-cfd#comments</comments>
		<pubDate>Fri, 11 Jan 2013 21:34:15 +0000</pubDate>
		<dc:creator>paramesh</dc:creator>
				<category><![CDATA[Past Events]]></category>
		<category><![CDATA[Research]]></category>

		<guid isPermaLink="false">http://lnf.umich.edu/index.php/?p=2298</guid>
		<description><![CDATA[Presenter: Amar S. Basu, Assistant Professor, Department Of Electrical and Computer Engineering, Wayne State University.&#8230; <a href="http://lnf.umich.edu/nnin-at-michigan/index.php/multiphase-cfd" class="read_more">Read More</a>]]></description>
			<content:encoded><![CDATA[<div class="announcement_post"><p>Presenter: Amar S. Basu, Assistant Professor, Department Of Electrical and Computer Engineering, Wayne State University.</p>
</div>
]]></content:encoded>
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		<slash:comments>0</slash:comments>
		</item>
		<item>
		<title>WIMS2 Seminar, Biomimetic Hair Sensors: Utilizing the Third Dimension, Professor Khalil Najafi</title>
		<link>http://lnf.umich.edu/wp-content/uploads/2012/11/WIMS2_Seminar_Flyer_Khalil_Najafi.pdf?utm_source=rss&#038;utm_medium=rss&#038;utm_campaign=wims2-seminar-series-biomimetic-hair-sensors-utilizing-the-third-dimension-professor-khalil-najafi</link>
		<comments>http://lnf.umich.edu/wp-content/uploads/2012/11/WIMS2_Seminar_Flyer_Khalil_Najafi.pdf#comments</comments>
		<pubDate>Wed, 21 Nov 2012 16:55:06 +0000</pubDate>
		<dc:creator>yates</dc:creator>
				<category><![CDATA[Past Events]]></category>

		<guid isPermaLink="false">http://lnf.umich.edu/index.php/?p=2214</guid>
		<description><![CDATA[FRIDAY NOVEMBER 30th 2012, 3:00-4:00 pm, 1005 EECS&#8230; <a href="http://lnf.umich.edu/wp-content/uploads/2012/11/WIMS2_Seminar_Flyer_Khalil_Najafi.pdf" class="read_more">Read More</a>]]></description>
			<content:encoded><![CDATA[<div class="announcement_post"><h3><strong>FRIDAY NOVEMBER 30th 2012, 3:00-4:00 pm, 1005 EECS</strong></h3>
</div>
]]></content:encoded>
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		</item>
		<item>
		<title>One Day MEMS Workshop</title>
		<link>http://lnf.umich.edu/nnin-at-michigan/?p=2192&#038;utm_source=rss&#038;utm_medium=rss&#038;utm_campaign=one-day-mems-workshop</link>
		<comments>http://lnf.umich.edu/nnin-at-michigan/?p=2192#comments</comments>
		<pubDate>Tue, 15 May 2012 20:17:20 +0000</pubDate>
		<dc:creator>paramesh</dc:creator>
				<category><![CDATA[Uncategorized]]></category>
		<category><![CDATA[CMOS]]></category>
		<category><![CDATA[MEMS]]></category>
		<category><![CDATA[Reduced Order Modelling]]></category>

		<guid isPermaLink="false">http://lnf.umich.edu/index.php/?p=1927</guid>
		<description><![CDATA[&#160;
&#160;
One Day MEMS Workshop &#8211; May 22nd, 2012
10:00 am &#8211; 4:00 pm
Win 1-2, 3358 AC,
Duderstadt Center,
University of Michigan &#8211; Ann Arbor.&#8230; <a href="http://lnf.umich.edu/nnin-at-michigan/?p=2192" class="read_more">Read More</a>]]></description>
			<content:encoded><![CDATA[<div class="announcement_post"><p>&nbsp;</p>
<p>&nbsp;</p>
<p>One Day MEMS Workshop &#8211; May 22nd, 2012<br />
10:00 am &#8211; 4:00 pm<br />
Win 1-2, 3358 AC,<br />
Duderstadt Center,<br />
University of Michigan &#8211; Ann Arbor.</p>
</div>
]]></content:encoded>
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		</item>
		<item>
		<title>Semiconductor Process Development and Integration with SEMulator3D</title>
		<link>http://lnf.umich.edu/nnin-at-michigan/index.php/2013/04/semulator/?utm_source=rss&#038;utm_medium=rss&#038;utm_campaign=semiconductor-process-development-and-integration-with-semulator3d</link>
		<comments>http://lnf.umich.edu/nnin-at-michigan/index.php/2013/04/semulator/#comments</comments>
		<pubDate>Mon, 22 Apr 2013 23:26:57 +0000</pubDate>
		<dc:creator>paramesh</dc:creator>
				<category><![CDATA[Past Events]]></category>
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		<guid isPermaLink="false">http://lnf.umich.edu/index.php/?p=2449</guid>
		<description><![CDATA[Topic: Semiconductor Process Development and Integration with SEMulator3D
Date: May 9th, 2013
Time: 11:00 am &#8211; 12:00 pm EDT.&#8230; <a href="http://lnf.umich.edu/nnin-at-michigan/index.php/2013/04/semulator/" class="read_more">Read More</a>]]></description>
			<content:encoded><![CDATA[<p>Topic: Semiconductor Process Development and Integration with SEMulator3D<br />
Date: May 9th, 2013<br />
Time: 11:00 am &#8211; 12:00 pm EDT.</p>
]]></content:encoded>
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		</item>
		<item>
		<title>Angle- Insensitive Structural Colours based on Metallic Nanocavities and Coloured Pixels beyond the Diffraction Limit</title>
		<link>http://lnf.umich.edu/index.php/2013/03/18/angle-insensitive-structural-colours-based-on-metallic-nanocavities-and-coloured-pixels-beyond-the-diffraction-limit/?utm_source=rss&#038;utm_medium=rss&#038;utm_campaign=angle-insensitive-structural-colours-based-on-metallic-nanocavities-and-coloured-pixels-beyond-the-diffraction-limit</link>
		<comments>http://lnf.umich.edu/index.php/2013/03/18/angle-insensitive-structural-colours-based-on-metallic-nanocavities-and-coloured-pixels-beyond-the-diffraction-limit/#comments</comments>
		<pubDate>Mon, 18 Mar 2013 16:31:16 +0000</pubDate>
		<dc:creator>sfortnam</dc:creator>
				<category><![CDATA[Featured]]></category>
		<category><![CDATA[Research]]></category>

		<guid isPermaLink="false">http://lnf.umich.edu/index.php/?p=2352</guid>
		<description><![CDATA[Current display technologies are based on chemical colorant pigmentation, which are vulnerable to a variety of processing chemicals, cannot withstand constant illumination with strong light intensities, and require extensive multilayer processing to pattern individual pixels. An alternative display technology being researched involves the use of photonic and plasmonic crystal based structures as colour filters, which offer increased efficiencies of filtering, low power consumption, slim dimensions, and enhanced resolution. However, the iridescence of these structural colour designs based on photonic crystals and plasmonic nano-structures cause a&#8230; <a href="http://lnf.umich.edu/index.php/2013/03/18/angle-insensitive-structural-colours-based-on-metallic-nanocavities-and-coloured-pixels-beyond-the-diffraction-limit/" class="read_more">Read More</a>]]></description>
			<content:encoded><![CDATA[<p>Current display technologies are based on chemical colorant pigmentation, which are vulnerable to a variety of processing chemicals, cannot withstand constant illumination with strong light intensities, and require extensive multilayer processing to pattern individual pixels. An alternative display technology being researched involves the use of photonic and plasmonic crystal based structures as colour filters, which offer increased efficiencies of filtering, low power consumption, slim dimensions, and enhanced resolution. However, the iridescence of these structural colour designs based on photonic crystals and plasmonic nano-structures cause a drastic change in colour with different incident angles of light.</p>
<p>As an alternative to grating coupling, the use of plasmonic based resonators and antennas was explored to obtain greater angle independence. This project implements vertical plasmonic resonator arrays with specially designed periodicity to avoid angle variation which were used to increase the scattering efficiency to viewers’ eyes and generate more vivid colours. The design proposed here utilizes light funneling into nanoslits which are exploited to demonstrate near perfect absorption, as large as 96%, in the visible spectrum with plasmonic mode coupling comparable to that of grating coupling. Additionally, wide colour tunability throughout the entire visible spectrum and pixel size beyond the diffraction limit (~λ/2) are demonstrated. A design principle for angle-robust reflection by investigation of angular response of the reflection spectra with respect to the periodicity of arrayed one-dimensional structures is suggested. The ultra-high resolution, widely tunable colour filtering is achieved through adjusting the dimensions of the groove depth. The grooves can be adjusted to provide the colors of yellow, cyan, and magenta by altering only the depth of the groove or the width of the groove while keeping the period and the other dimension constant, whi<a href="http://lnf.umich.edu/index.php/2013/03/18/angle-insensitive-structural-colours-based-on-metallic-nanocavities-and-coloured-pixels-beyond-the-diffraction-limit/olympic-ring-example/" rel="attachment wp-att-2353"><img class="wp-image-2353 alignright" title="Olympic Ring Example" src="http://lnf.umich.edu/wp-content/uploads/2013/03/Olympic-Ring-Example.png" alt="" width="307" height="259" /></a>ch provides the wide color tunability. An example of the visual performance of this technique is show in figure 1 to the right, where this method was employed to create Olympic rings of varying colour with figures inside, through varying the width of the grooves only. This shows the ultra-high resolution possible as well as an example of the color tunability of the device. The angular dependence of these images was measured only up to 30 degree because of the small size of the structure and the limitation of the optical path in the microscope. Within this range, the color appears unchanged. This is an example of the type of performance possible from this approach, which has multiple practical applications. To read more on this exciting research being conducted at the Lurie Nanofabrication Lab at the University of Michigan, visit the link below to view the full article.</p>
<p style="text-align: right;">
<p style="text-align: right;"><strong>Figure 1: </strong>Colour demonstrations with ultra-high<br />
resolution and polarization dependent images.</p>
<hr />
<p>Yi-Kuei Ryan Wu, Andrew E. Hollowell, Cheng Zhang, L. Jay Guo<br />
Work performed in the U Michigan Lurie Nanofabrication Lab</p>
<p>Scientific Reports 3, 1194, 01 February 2013</p>
<p>Full article can be viewed at: http://www.nature.com/srep/2013/130201/srep01194/full/srep01194.html</p>
]]></content:encoded>
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		<item>
		<title>Large Stroke Electrostatic Comb-Drive Actuators Enabeled by a Novel Flexure Mechanism</title>
		<link>http://lnf.umich.edu/index.php/2013/03/11/large-stroke-electrostatic-comb-drive-actuators-enabeled-by-a-novel-flexure-mechanism/?utm_source=rss&#038;utm_medium=rss&#038;utm_campaign=large-stroke-electrostatic-comb-drive-actuators-enabeled-by-a-novel-flexure-mechanism</link>
		<comments>http://lnf.umich.edu/index.php/2013/03/11/large-stroke-electrostatic-comb-drive-actuators-enabeled-by-a-novel-flexure-mechanism/#comments</comments>
		<pubDate>Mon, 11 Mar 2013 18:33:28 +0000</pubDate>
		<dc:creator>sfortnam</dc:creator>
				<category><![CDATA[Featured]]></category>
		<category><![CDATA[Research]]></category>

		<guid isPermaLink="false">http://lnf.umich.edu/index.php/?p=2322</guid>
		<description><![CDATA[Electrostatic comb-drives are one of the most common actuators in microelectromechanical systems (MEMS). Their advantages include ease of fabrication, constant generated force over the range of motion, and fast dynamic response. However, the motion range of comb-drive actuator is generally limited due to the sideways snap-in of the moving comb. This snap-in instability occurs when the actuator is unable to provide adequate stiffness against sideways electrostatic forces. Researchers at the Precision Systems Design Laboratory (PSDL) of the University of Michigan have developed and demonstrated novel&#8230; <a href="http://lnf.umich.edu/index.php/2013/03/11/large-stroke-electrostatic-comb-drive-actuators-enabeled-by-a-novel-flexure-mechanism/" class="read_more">Read More</a>]]></description>
			<content:encoded><![CDATA[<p>Electrostatic comb-drives are one of the most common actuators in microelectromechanical systems (MEMS). Their advantages include ease of fabrication, constant generated force over the range of motion, and fast dynamic response. However, the motion range of comb-drive actuator is generally limited due to the sideways snap-in of the moving comb. This snap-in instability occurs when the actuator is unable to provide adequate stiffness against sideways electrostatic forces. Researchers at the Precision Systems Design Laboratory (PSDL) of the University of Michigan have developed and demonstrated novel guidance flexure mechanisms that mitigate the snap-in phenomenon in comb-drives, thereby enabling very large strokes.</p>
<p>“The novel mechanism design offers high bearing direction stiffness while maintaining low motion direction stiffness, over a large range of motion direction displacement. The resulting high stiffness ratio mitigates the on-set of sideways snap-in instability, thereby offering significantly greater actuation stroke compared to existing designs.” said Mohammad Olfatnia, a Post-doctoral fellow at the Mechanical Engineering Department.<a href="http://lnf.umich.edu/index.php/2013/03/11/large-stroke-electrostatic-comb-drive-actuators-enabeled-by-a-novel-flexure-mechanism/sem-inside-page/" rel="attachment wp-att-2327"><img class="wp-image-2327 alignright" title="SEM-Inside Page" src="http://lnf.umich.edu/wp-content/uploads/2013/03/SEM-Inside-Page.jpg" alt="" width="289" height="267" /></a></p>
<p>“Large actuation stroke (larger than 100 µm) with limited foot-print and actuation effort is desirable in a wide range of MEMS applications including optical switches, data-storage systems, high resolution micro printing, endoscopic microscopy, and scanning probe microscopy.” said Shorya Awtar, Assistance Professor of Mechanical Engineering Department.</p>
<p>The electrostatic comb drive actuators fabricated at the Lurie Nanofabrication Facility (LNF) with the new design provide strokes as large as ±245 µm at 120 V and 8 mm<sup>2</sup> foot-print. In theory, this allows the design of comb-drive actuators such that their stroke is limited simply by the material failure criteria or the available actuation voltage, and not sideways snap-in instability. This research was funded in part by the National Science Foundation.</p>
<hr />
<p>M. Olfatnia, S. Sood, J.J. Gorman, S. Awtar; University of Michigan<br />
Work performed in the U Michigan Lurie Nanofabrication Lab</p>
<p>M. Olfatnia, S. Sood, J.J. Gorman, S. Awtar; Journal of Microelectromechanical Systems, PP 99 (2012)</p>
]]></content:encoded>
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		</item>
		<item>
		<title>Allen Angle, New Career at NeuroNexus</title>
		<link>http://lnf.umich.edu/index.php/2012/12/17/allen-angle-new-career-at-neoronexus/?utm_source=rss&#038;utm_medium=rss&#038;utm_campaign=allen-angle-new-career-at-neoronexus</link>
		<comments>http://lnf.umich.edu/index.php/2012/12/17/allen-angle-new-career-at-neoronexus/#comments</comments>
		<pubDate>Mon, 17 Dec 2012 18:31:52 +0000</pubDate>
		<dc:creator>yates</dc:creator>
				<category><![CDATA[Featured]]></category>
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		<guid isPermaLink="false">http://lnf.umich.edu/index.php/?p=2285</guid>
		<description><![CDATA[Free Press Headline
&#8220;After layoff, training from community college
helps launch older worker into a new field&#8221;
Allen completed his Internship for Oakland Community College at the LNF!
Read More&#8230; <a href="http://lnf.umich.edu/index.php/2012/12/17/allen-angle-new-career-at-neoronexus/" class="read_more">Read More</a>]]></description>
			<content:encoded><![CDATA[<h1>Free Press Headline</h1>
<h1>&#8220;After layoff, training from community college</h1>
<h1>helps launch older worker into a new field&#8221;</h1>
<p>Allen completed his Internship for Oakland Community College at the LNF!</p>
<p><a href="http://www.freep.com/article/20121217/NEWS06/312170062/After-layoff-training-from-community-college-helps-launch-older-worker-into-a-new-field">Read More</a></p>
]]></content:encoded>
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		</item>
		<item>
		<title>Debugging MEMS Process Flows with Physical Simulation</title>
		<link>http://lnf.umich.edu/nnin-at-michigan/index.php/debugging-mems/?utm_source=rss&#038;utm_medium=rss&#038;utm_campaign=2281</link>
		<comments>http://lnf.umich.edu/nnin-at-michigan/index.php/debugging-mems/#comments</comments>
		<pubDate>Fri, 07 Dec 2012 15:46:28 +0000</pubDate>
		<dc:creator>paramesh</dc:creator>
				<category><![CDATA[Uncategorized]]></category>

		<guid isPermaLink="false">http://lnf.umich.edu/index.php/?p=2281</guid>
		<description><![CDATA[Presenter: Thomas Hall, Intellisense Corporation.&#8230; <a href="http://lnf.umich.edu/nnin-at-michigan/index.php/debugging-mems/" class="read_more">Read More</a>]]></description>
			<content:encoded><![CDATA[<p>Presenter: Thomas Hall, Intellisense Corporation.</p>
]]></content:encoded>
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