Lurie Nanofabrication Facility
microfabrication nanofabrication services
LNF @ Michigan is Your Facility for Success
The Lurie Nanofabrication Facility (LNF) is available, on a fee basis, for use by research groups from government, industry and universities. Equipment and processes are available for research on silicon integrated circuits, MEMS, III-V compound devices, organic devices and nanoimprint technology. We also encourage researchers from non-traditional disciplines to make use of our processes, such as metal and dielectric coatings, vacuum processes, fabrication of micro and nano components and metrology tools.
Capabilities
Overview Technologies Equipment The LNF is a micro and nanofabrication facility. Our primary fabrication technologies evolve from microchip fabrication. These technologies have been tailored or modified to produce mechanical and optical devices in addition to electronics. Most of our … [Read More...]
Getting Access
The LNF is currently closed due to the coronavirus, but please check below about how to use our capabilities! There are two main options described below: 1) come and use the LNF yourself with the support of staff members or 2) have LNF staff members perform the process for you. If you are not … [Read More...]
