Auger Nanoprobe – The Most Powerful Probe in the Nanoworld!


Abstract: Due to the rapid progress in nanoscience and nanotechnology, a powerful tool which can characterize the device and structure at nanometer level is highly demanded. The instrument to analyze the composition of thin films or patterned structures and detect contaminants or residues is critical to the design of new materials, facilitating manufacturing processes, and increasing product quality/yield. Optical methods and EDX analysis have found their limitations in detecting the continued shrinking of device size and critical defect size, while Auger nanoprobe exhibits its irreplaceable advantages in such application. As a sophisticated surface analysis tool, Auger nanoprobe can provide comprehensive information as one can get from both XPS and SEM. Among surface analysis methods, Auger electron spectroscopy stands out in its excellent spatial resolution (~10 nm), amazing surface sensitivity (~2 nm in depth), and highly efficient detection of light elements. As far as the surface sensitivity is concerned, Auger nanoprobe provides the smallest analysis volume, which is second to none. The availability of various modes of operation is a plus, including survey, multiplex, line, profile, and elemental mapping. Therefore, this technique is ideal for analyzing compositions, identifying chemical states, detecting elemental distribution and mapping depth profile of particulates, interfaces, and second phases. More wide applications of Auger nanoprobe, include but not limited to, materials characterization, thin film analysis, corrosion product chemistry, failure analysis, particle identification for semiconductor and thin film head manufacturing, and mineral chemistry.

Speaker Bio: Jerry Li is a Research Lab Specialist / Scientist of Electron Microbeam Analysis Laboratory, a research unit at University of Michigan. Dr. Li received his PhD degree in chemical physics from the University of Science and Technology of China. Dr. Li has over 10 years experience in the R&D of nanostructured materials; specializing in controlled synthesis, characterization and applications of carbon nanotubes and graphene. Dr. Li’s research experience interfaces with materials science, nanotechnology and advanced material characterization techniques. He has published more than 100 peer-reviewed journal papers, more than 50 works on conferences, and has filed 5 patents. He has been the PI and Co-PIs of 4 research grants (totaling more than $3M).