Equipment

EECS
- Clean Room
- DC Testing Lab
  - Metrology
    Alessi probe station
    HP4145 Parametric Analyzer
    Keithley 4200 #2
- LNF Offices
  - Offices
    Conf. Room (EECS 1340)
- Wet Chemistry
  - Annealing
    Convection Oven
    YES Vacuum Oven
  - Bio
    BSL-2 Room
  - Lithography
    Dimatix InkJet
    MJB 45S
    NanoInk DPN 5000
  - Metrology
    Agilent uFTIR
    Dektak 6M Surface Profilometer
    NanoSpec 6100
    Olympus BX-51 Microscope
    Olympus LEXT Interferometer
    Rame-Hart Goniometer
  - Packaging
    ADT 7100 Dicing Saw
    Flip Chip Bonder
    Wire Bonder
  - Polishing
    CMP Strasbaugh 6EC
    Lapper
  - Wafer Clean
    Glen 1000P Plasma Cleaner
    SSEC Wafer Cleaner
  - Wet Benches
    Acid Bench 92, 1436B
    Base Bench 91, 1436A
    EDP Bench 93, 1436B
    Solvent Bench 94, 1436D

The Buzz About the LNF...

“Awesome! Tony. I had problem with the STS tool today and was looking for a staff to help out. While I saw him working near by furnace tool, I asked his help with the STS tool since I assume he had experience in the past. Tony was very friendly and helpful. He checked the STS tool and with Russ help, he also fixed the plasma tool and make the STS now fully functional both the tool and recipe. I admire his ability to identify this plasma tool problem (correct matching tune&load of the RF power) and how helpful he is. Thank you so much! You are the best!”